|
|
| REACTOR CHAMBER
|
MATERIAL |
ALUMINIUM |
| DIMENSION |
1500 W x 1200 Dx 1700H |
| CHAMBER SIZE |
500W x 650D x 700H |
| VACUUM SYSTEM
|
PUMP |
DRY PUMP (BOOSTER) |
| TYPE |
OIL BOOSTER |
| PUMP CAPACITY |
150 ~20K m^3/h |
| PRESSURE MEASUREMENT
|
PROCESS VACUUM |
PIRANI & BARATRON GAUGE |
| COARSE VACUUM |
MEMBRANE PRESSURE GAUGE |
| PROCESS GASES
|
CALIBRAT ED
ED |
O2 |
1000 sccm |
| CF4 |
100 sccm |
| Ar |
1000 sccm |
| N2 |
1000 sccm |
| PROCESS GAS REGULATION
|
MFC |
| GENERATOR
|
MANUFACTURER |
AE, ENT, ETC |
| TYPE |
LF 2.5~5.0 KW, RF POWER |
| FREQUENCY |
40 kHz, 13.56MHz |
| CAPACITY |
max. 5.0 KW |
| LOAD MATCH
|
MANUFACTURER |
OPTION |
| TYPE |
OPTION |
| CONTROL SYSTEM
|
HARDWARE |
PC, PLC (INTEGRATED MONITOR) |
| DATA ENTRY |
TOUCH SCREEN&KEYBOARD |
| INTERFACE |
DEVICE NET |
|
