|
|
| REACTOR CHAMBER
|
MATERIAL |
ALUMINIUM |
| HEIGHT |
850(mm) |
| DIAMETER |
770(mm) |
| VACUUM SYSTEM
|
MANUFACTURER |
EBARA |
| TYPE |
A25S |
| PUMP CAPACITY |
150 m^3/h |
| PRESSURE MEASUREMENT
|
FINE VACUUM |
PIRANI PRESSURE GAUGE |
| COARSE VACUUM |
MEMBRANE PRESSURE GAUGE |
| PROCESS GASES
|
CALIBRAT
ED |
O2 |
1000 sccm |
| CF4 |
100 sccm |
| Ar |
1000 sccm |
| N2 |
1000 sccm |
| PROCESS GAS REGULATION
|
MFC |
| GENERATOR
|
MANUFACTURER |
ADVANCED ENERGY (AE) |
| TYPE |
PE 2500 |
| FREQUENCY |
40 kHz |
| CAPACITY |
max. 2500 W |
| LOAD MATCH
|
MANUFACTURER |
ADVANCE ENERGY (AE) |
| TYPE |
LM 2.5K |
| CONTROL SYSTEM
|
HARDWARE |
PC (INTEGRATED MONITOR) |
| DATA ENTRY |
TOUCH SCREEN&KEYBOARD |
| INTERFACE |
DEVICE NET |
|
