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As solarcell equipment, this is a horizontal type, not a vertical, and has high efficiency and productivity,
and is optimized to be fit to a rectangular wafer (begin used by K company, Japan) |
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Specification |
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| 1. |
Wafer Size :150 X 155 |
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| 2. |
Wafer Thickness: 0.2 ~0.4 T |
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| 3. |
Normal Temp. Range : 800 ~850(°C) |
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| 4. |
Flat Zone Length : 950mm±1.0(°C) |
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| 5. |
Zone Control : 3 Zones |
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| 6. |
Heater Outside Temp.: 50(°C) |
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| 7. |
Control Method : Spike Profile |
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| 8. |
Thermocouple : Type “k” |
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| 9. |
Process Tube / Boat : Quartz Ware(GE214) |
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| 10. |
Water Cooling System |
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