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Wafer EFEM |
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By using of FOUP Opener, this is to transfer it to Processing System. Also, it’s improved Stability and
Accuracy by using of Clean Robot. |
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Specification |
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Project Name: LCOS SYSTEM/ UNLOADER |
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Dimension : 1600L X 650W X 1920H |
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Wafer Spec : 200mm~300mm(Glass, Silicon) |
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Robot Type : Single Arm ROBOT (ATM) |
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Utility |
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Power : 200V 1Φ, 15A, 3,3KW |
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Air : 5Kg/cm2 |
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Vacuum Air : 500mmHg Over |
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Communication: LAN or Serial |
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Foup |
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| This is Loading system to supply 300mm Wafer from Foup into Process Chamber. |
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Specification |
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Size : 542W x 964D x 1280H(mm) |
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Port : 1 ~2 |
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Feature : Standard loader Port is suitable to the difficult environment and in up to 80’c. |
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Mainly this is used to Furnace Loader. |
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