Foup


 

Foup Opener Load Port

This load system supplies a 300 mm wafer into a process chamber from a foup.

Specification

  1. Size : 542W x 964L x 1280H
  2. Port : 1~2 units
  3. Characteristic : This is adequate to the environment that can not be applicable with a standard loader port, and this can operate at up to 80¡É and is mainly used to a furnace loader.

Wafer EFEM

Wafer EFEM

By using a foup opener, this equipment transfers an object to a processing system and has high accuracy and stability by being applied with a clean robot.

Specification

  1. SYSTEM NEME : LCOS SYSTEM / UNLOADER
  2. SYSTEM OUT DIM : 1600L X 650W X 1920H
  3. WAFER SPEC, GLASS AND SILICON
  4. BOTOT TYPE : SINGLE ARM ROBOT (ATM)
  5. UTILITY SOURCE
    - POWER : 200V 1¥Õ, 15A, 3,3KW
    - AIR UTIL : PRESSURE 5Kg/cm2 VACUUM 500mmHg OVER
  6. COMMUNICATION : LAN or SERIAL

Wafer Indexer

Wafer Indexer

This equipment transfers a wafer cassette to processing equipment and can be available up to 200 mm ~ 300 mm.